人工晶体学报2026，Vol.55Issue(9)：1437-1447,11.DOI:10.16553/j.cnki.issn1000-985x.2026.0085
热屏位置对熔体流场及氧迁移路径的影响
Effect of Thermal Shield Position on Melt Flow Field and Oxygen Migration Path
摘要
Abstract
Monocrystalline silicon components serve as core parts of semiconductor equipment and are widely used in various high-temperature manufacturing processes of integrated circuits.Oxygen content dominates their performance and service life.With distinct control standards for different application scenarios,precise oxygen control is critical to industrial development.This paper investigates the influence of thermal shield position on the argon flow field,melt flow field and temperature field,and further reveals the internal mechanism of the synergistic effect between the melt flow field and temperature field on the dissolution capacity,migration flux and migration path of oxygen impurities.The results show that reducing the spacing between the thermal shield and the crystal can increase the argon flow velocity near the triple-phase point,enhance crystal heat dissipation,stabilize the growth interface and improve the removal efficiency of oxygen impurities.Meanwhile,it homogenizes the melt temperature field,inhibits quartz crucible dissolution,optimizes melt turbulent viscosity,and weakens the transport and migration of oxygen impurities in the melt.In addition,compact small eddies form on the melt surface,altering the migration path of oxygen impurities.Under the combined effect of melt flow field and temperature field,the maximum radial oxygen content of the crystal decreases by 0.275×1017 atoms/cm3,and the average value decreases by 0.206×1017 atoms/cm3.关键词
直拉单晶硅/热屏位置/氧迁移路径/晶体氧含量/熔体流场Key words
Czochralski monocrystalline silicon/thermal shield position/oxygen migration path/crystal oxygen content/melt flow field分类
数理科学引用本文复制引用
杨平平,李少猛,杨斐,赵紫薇,高忙忙..热屏位置对熔体流场及氧迁移路径的影响[J].人工晶体学报,2026,55(9):1437-1447,11.基金项目
中国科学院"西部之光"人才培养计划(XAB2022YW10) （XAB2022YW10）
宁夏自然科学基金(2025AAC030210) （2025AAC030210）
银川市工业蓝宝石产业工程师协同创新中心建设项目(B202308) （B202308）
宁夏回族自治区重点研发项目(2024BEE01003) （2024BEE01003）
