电子元件与材料2011，Vol.30Issue(1)：4-7,4.
sol-gel法制备氧化锌铝陶瓷靶材及其性能研究
Study on preparation and properties of zinc aluminum oxide ceramic targets prepared by sol-gel method
刘磊 1张勤勇 1陈建文 1金应荣 1王鹏飞1
作者信息
- 1. 西华大学,材料科学与工程学院,四川,成都,610039
- 折叠
摘要
Abstract
To increase the properties of AZO targets fabricated by normal pressure sintering method, using the sol-gel method prepared Al-ZnO (AZO) nanocomposite powders as raw material, the preparing process parameters were optimized.The results indicate that the wet milling is benefit to the green density uniformity; with the increase of forming pressure, the density of target first increases and then decreases, but the resistivity has the reverse trend; increasing the sintering holding time, the grain size increases, however, the improvements of density and resistivity are not obvious. Using 2 MPa forming pressure, sintering at 1 250 ℃ for 1.0 h, the density of zinc oxide target doped with w(Al)=2％ is up to 99.2％, and the resistivity is about 2× 10-2 Ω · cm.关键词
AZO靶材/sol-gel法/致密度/电阻率Key words
AZO target/ sol-gel method/ density/ resistivity引用本文复制引用
刘磊,张勤勇,陈建文,金应荣,王鹏飞..sol-gel法制备氧化锌铝陶瓷靶材及其性能研究[J].电子元件与材料,2011,30(1):4-7,4.
