机器人2011，Vol.33Issue(3)：366-370,5.DOI:10.3724/SP.J.1218.2011.00366
基于MEMS技术的SU-8仿昆虫微扑翼飞行器设计及制作
Design and Fabrication of an SU-8 Biomimetic Flapping-wing Micro Air Vehicle by MEMS Technology
摘要
Abstract
To develop a light biomimetic flapping-wing micro air vehicle, SU-8 photoresist in micro-electromechanical system (MEMS) field is used as its structural materials. Based on the bionics principle and MEMS technology, the structure and MEMS fabrication process are designed. The results show that this kind of structural design and production solution meet design requirements, and provide a good way for design and fabrication of flapping-wing micro air vehicle.关键词
微扑翼飞行器/SU-8/MEMS/仿生机器人Key words
flapping-wing micro air vehicle/ SU-8/ MEMS (micro-electromechanical system)/ bio-robot分类
信息技术与安全科学引用本文复制引用
迟鹏程,张卫平,陈文元,李洪谊,孟坤,崔峰,刘武,吴校生..基于MEMS技术的SU-8仿昆虫微扑翼飞行器设计及制作[J].机器人,2011,33(3):366-370,5.基金项目
国家863计划资助项目(2009AA04Z203):机器人学国家重点实验室开放基金资助项目(R20200904):上海交通大学SMC基金资助项目(T241460622). （2009AA04Z203）
