电子元件与材料2011，Vol.30Issue(5)：61-64,4.
可伐合金的可控氧化对封接质量的影响
Effect of control oxidation of Kovar alloy on its sealing quality with glass
摘要
Abstract
The effects of the types and thicknesses of Kovar alloy oxidation film on the sealing quality with glass were investigated. The results show that the types and thicknesses of the oxidation film have an important impact on the sealing quality. Compared with the oxidation condition in factories, the uniformity and reliability of the gas tightness of Kovar alloy sealing with glass in the controlled oxidation condition are higher. The climbing height of glass along the pins increases gradually with the increasing thickness of oxidation film, while all the heights are lower than 200 μm when the thickness of oxidation film is less than 1.5 μm; the bonding strength increases firstly and then decreases gradually, and the optimized bonding strength is about 66 N. The sealing quality is higher when the thickness of oxidation film is 0.5-1.0 μm.关键词
可伐合金/氧化膜/玻璃/封接Key words
Kovar alloy/ oxidation film/ glass/ sealing分类
矿业与冶金引用本文复制引用
罗大为,沈卓身..可伐合金的可控氧化对封接质量的影响[J].电子元件与材料,2011,30(5):61-64,4.基金项目
深圳市科技局资助项目(No.JC201006020768A) （No.JC201006020768A）
