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沉积时间对Au/Si-NPA电学特性的影响

富笑男 程莉娜 罗艳伟 刘琨 王信春

电子元件与材料2011,Vol.30Issue(6):40-42,47,4.
电子元件与材料2011,Vol.30Issue(6):40-42,47,4.

沉积时间对Au/Si-NPA电学特性的影响

Effects of deposition time on the electrical characteristics of Au/Si nanoporous pillar array

富笑男 1程莉娜 1罗艳伟 1刘琨 1王信春2

作者信息

  • 1. 河南工业大学理学院,河南郑州450001
  • 2. 河南大学特种功能材料教育部重点实验室,河南开封475004
  • 折叠

摘要

Abstract

A group of Au/silicon nanoporous pillar array (Au/Si-NPA) samples were prepared on silicon nanoporous pillar array (Si-NPA) substrates by immersion method. Different deposition times were used for different Au/Si NPA samples. The effects of deposition time on the electrical characteristics of Au/Si NPA were studied by measuring and comparing the Ⅰ-Ⅴ curve of the prepared Au/Si NPA. The results show that the positive current of Au/Si NPA decreases with increasing deposition time when the deposition time is below 30 min, while the positive current of Au/Si NPA shows an opposite trend when the deposition time is above 30 minutes. This change is mainly caused by changes occurring in the surface morphology and composition of Au/Si NPA.

关键词

硅纳米孔柱阵列(Si-NPA)/I-V曲线/Au/Si-NPA/整流特性

Key words

silicon nanoporous pillar array (Si-NPA): Ⅰ-Ⅴ curves/ Au/Si-NPA/ rectifying characteristic

分类

数理科学

引用本文复制引用

富笑男,程莉娜,罗艳伟,刘琨,王信春..沉积时间对Au/Si-NPA电学特性的影响[J].电子元件与材料,2011,30(6):40-42,47,4.

基金项目

国家自然科学基金资助项目(No.10574112) (No.10574112)

河南省教育厅自然科学基金资助项目(No.2007140003) (No.2007140003)

河南工业大学科研基金资助项目(No.07XJC010) (No.07XJC010)

河南工业大学博士基金资助项目(No.2007BS009) (No.2007BS009)

电子元件与材料

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