电子元件与材料2011,Vol.30Issue(6):40-42,47,4.
沉积时间对Au/Si-NPA电学特性的影响
Effects of deposition time on the electrical characteristics of Au/Si nanoporous pillar array
摘要
Abstract
A group of Au/silicon nanoporous pillar array (Au/Si-NPA) samples were prepared on silicon nanoporous pillar array (Si-NPA) substrates by immersion method. Different deposition times were used for different Au/Si NPA samples. The effects of deposition time on the electrical characteristics of Au/Si NPA were studied by measuring and comparing the Ⅰ-Ⅴ curve of the prepared Au/Si NPA. The results show that the positive current of Au/Si NPA decreases with increasing deposition time when the deposition time is below 30 min, while the positive current of Au/Si NPA shows an opposite trend when the deposition time is above 30 minutes. This change is mainly caused by changes occurring in the surface morphology and composition of Au/Si NPA.关键词
硅纳米孔柱阵列(Si-NPA)/I-V曲线/Au/Si-NPA/整流特性Key words
silicon nanoporous pillar array (Si-NPA): Ⅰ-Ⅴ curves/ Au/Si-NPA/ rectifying characteristic分类
数理科学引用本文复制引用
富笑男,程莉娜,罗艳伟,刘琨,王信春..沉积时间对Au/Si-NPA电学特性的影响[J].电子元件与材料,2011,30(6):40-42,47,4.基金项目
国家自然科学基金资助项目(No.10574112) (No.10574112)
河南省教育厅自然科学基金资助项目(No.2007140003) (No.2007140003)
河南工业大学科研基金资助项目(No.07XJC010) (No.07XJC010)
河南工业大学博士基金资助项目(No.2007BS009) (No.2007BS009)