电子元件与材料2011，Vol.30Issue(3)：28-31,4.
SiO2/VOx多层复合薄膜的结构与性能研究
Investigation on structure and properties of SiO2/VOx multilayer composite films
罗烽月 1黄维刚1
作者信息
- 1. 四川大学,材料科学与工程学院,四川,成都,610065
- 折叠
摘要
Abstract
SiO2/VOx multilayer composite films deposited on the common glass substrates by RF magnetron sputtering method were prepared successfully. The phase structure, thermochromic phase transition character and vanadium valence state were analyzed by XRD, FTIR, UV-Vis and XPS. The results show that the VO2 crystalline contained in prepared films has (110) preferential orientation. The SiO2 base coating is helpful to improve the crystallinity of the VO2 phase and increase the content of V4+ from 53.9％ to 66.0％ (mole fraction). The visible transmittance of SiO2/VOx/SiO2 multilayer composite film, which is improved by SiO2 antireflection coating obviously, can be up to 51％ when the deposition time of SiO2 contireflection coating is 60 min. The SiO2/VOx/SiO2 multilayer composite films exhibit good thermochromic phase transition character.关键词
氧化钒薄膜/二氧化硅薄膜/多层复合薄膜/射频磁控溅射Key words
VOx film/ SiO2 film/ multilayer composite film/ RF magnetron sputtering分类
通用工业技术引用本文复制引用
罗烽月,黄维刚..SiO2/VOx多层复合薄膜的结构与性能研究[J].电子元件与材料,2011,30(3):28-31,4.
