电子元件与材料2011，Vol.30Issue(4)：21-24,4.
钛酸锶钡/铋锌铌多层复合薄膜的制备及性能
Preparation and dielectric properties of Ba0.5Sr0.5TiO3/Bi1.5Zn1.0Nb1.5O7 multilayer composite films
摘要
Abstract
Ba0.5Sr0.5TiO3/Bi1.5Zn1.0Nb1.5O7 (BST/BZN) multilayer composite films were prepared on Pt/Ti/SiO2/Si substrates by the sol-gel method. The structures, microscopic morphologies and dielectric properties of BST/BZN multilayer composite films annealed at different temperatures were studied. The results show that perovskite BST phase and cubic pyrochlore BZN phase can be found in the prepared multilayer composite films annealed at above 700 ℃. The BST/BZN multilayer composite film annealed at 750 ℃ shows a compact and crack-free surface, while its dielectric permittivity and dielectric loss are 146 and 0.004, respectively. In addition, at 10 kHz and 6×105 V/cm, its dielectric tunability and figure of merit (FOM, defined as the ratio of dielectric tunability and dielectric loss at room temperature) reach 13％ and 32.5, respectively.关键词
微波介质薄膜/钛酸锶钡/铋锌铌/溶胶-凝胶法Key words
microwave dielectric thin films/ Ba0.5Sr0.5TiO3/Bi1.5Zn1.0Nb1.5O7/ sol-gel method分类
信息技术与安全科学引用本文复制引用
阎鑫,任巍..钛酸锶钡/铋锌铌多层复合薄膜的制备及性能[J].电子元件与材料,2011,30(4):21-24,4.基金项目
国家自然科学基金资助项目(No.50572086) （No.50572086）
中央高校基本科研业务费专项资金资助(No.CHD2009JC010):深圳大学深圳市特种功能材料重点实验室开放基金资助项目(No.T201009) （No.CHD2009JC010）
