电子元件与材料2009，Vol.28Issue(11)：20-22,3.DOI:10.3969/j.issn.1001-2028.2009.11.006
复合钒钛酸干凝胶薄膜的湿敏特性研究
Humidity sensitive properties of poly-vanadium-titanium acid xerogel thin films
摘要
Abstract
Poly-vanadium-titanium acid xerogel(H_2V_(10)Ti_2O_(30-y)·nH_2O)thin films were fabricated by sol-gel method and their humidity sensitive properties were studied. The results show that the thin films have a layered structure. The humidity sensitive property curve of the humidity sensor prepared by this thin films is good linearity in the range of RH 11%～95%. Its response time and recovery time of the humidity sensor are 5 s and 20 s, respectively. The humidity hysteresis is RH 2% and the temperature coefficient of the humidity is RH 0.45% /℃ for the humidity sensor. The humidity sensor appear good long term stability. The sensitivity and humidity hysteresis of the humidity sensor are superior than those of poly-vanadium acid xerogel thin film humidity sensors.关键词
sol-gel法/复合钒钛酸干凝胶/薄膜/湿敏特性Key words
sol-gel method/ poly-vanadium-titanium acid xerogel/ thin films/ humidity sensitive properties分类
信息技术与安全科学引用本文复制引用
李莉,盖翠萍,杨雪凤,邵丽英,王宝辉..复合钒钛酸干凝胶薄膜的湿敏特性研究[J].电子元件与材料,2009,28(11):20-22,3.基金项目
黑龙江省教育厅科学技术研究资助项目(No. 11531009) （No. 11531009）
