电子元件与材料2011，Vol.30Issue(9)：76-81,6.
RF-MEMS谐振器和滤波器研究进展
Development of the RF-MEMS resonators and filters
摘要
Abstract
RF-MEMS resonators and filters which based on the comb, beam and disk structures are introduced. The parameters of structure and performance of several RF-MEMS resonators and filters are discussed. The related problems and its handling techniques of RF-MEMS resonators and filters in the design and manufacture process are analyzed. RF-MEMS resonators and filters have excellent performance, can be integrated with other circuit components on a chip, and be compatible with integrated circuit process, would be used in the radio frequency communication systems.关键词
射频微机电系统/微机械谐振器/综述/微机械滤波器Key words
RF-MEMS/micro-electro-mechanical resonators/review/micro-electro-mechanical filters分类
信息技术与安全科学引用本文复制引用
潘武,宋茂叶,吴文雯,张雪莲..RF-MEMS谐振器和滤波器研究进展[J].电子元件与材料,2011,30(9):76-81,6.基金项目
重庆市自然科学基金资助项目(No.CSTC2010BB2414) （No.CSTC2010BB2414）
