电子元件与材料2011，Vol.30Issue(12)：27-29,3.
sol-gel法制备ZAO薄膜的结构与光学性能研究
Structure and optical properties of ZAO thin films prepared by sol-gel method
摘要
Abstract
Al-doped ZnO (ZAO) thin films were deposited on the ordinary glass substrate by sol-gel method. The structure and optical properties of prepared ZAO thin films were studied by using X-ray diffraction (XRD), scanning electron microscopy (SEM), ultraviolet and visible (UV-Vis) spectroscopy, and photoluminescence (PL) spectra. The results show that ZAO thin films are featured in c-axis preferred orientation, which is consistent with the crystalline phase of ZnO. And as-prepared ZAO thin films possess strong luminescence band in the wavelength rang of 350-575 nm and exhibit an average transmittance of above 88% in the visible region. With the increase of the Al doping amount, the band-gap of ZAO films increases, the absorption edge blue shifts, and the photoluminescence intensity increases first and then decreases. Particularly, when the mole ratio of AI to Zn is 0.010, the transmittance in the visible region of the ZAO thin films reaches the highest value of at 91%; and the photoluminescence intensity reaches 46.3.关键词
溶胶—凝胶法/ZAO薄膜/紫外—可见光谱/光致发光(PL)Key words
sol-gel method/ ZAO thin films/ UV-Vis spectroscopy/ photoluminescence (PL)引用本文复制引用
曾凡菊,谭永前,李光辉..sol-gel法制备ZAO薄膜的结构与光学性能研究[J].电子元件与材料,2011,30(12):27-29,3.基金项目
凯里学院2011年课题资助(No.Z1123) （No.Z1123）
