Nano-WO3 film modified macro-porous silicon (MPS) gas sensorOACSCDCSTPCD
Nano-WO3 film modified macro-porous silicon (MPS) gas sensor
We prepared macro-porous silicon (MPS) by electrochemical corrosion in a double-tank cell on the surface of single-crystalline P-type silicon.Then,nano-WO3 films were deposited on MPS layers by DC facing target reactive magnetron sputtering.The morphologies of the MPS and WOs/MPS samples were investigated by using a field emission scanning electron microscope.The crystallization of WO3 and the valence of the W in the WO3/MPS sample were characterized by X-ra…查看全部>>
Sun Peng;Hu Ming;Li Mingda;Ma Shuangyun
School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, ChinaSchool of Electronic and Information Engineering, Tianjin University, Tianjin 300072, ChinaSchool of Electronic and Information Engineering, Tianjin University, Tianjin 300072, ChinaSchool of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China
MPS WO3/MPS gas sensor gas sensing properties room temperature
MPS WO3/MPS gas sensor gas sensing properties room temperature
《半导体学报（英文版）》 2012 (5)
低功耗高性能多孔硅基底WO3基薄膜气敏微传感器研究
83-87,5
Project supported by the National Natural Science Foundation of China (No.60771019) and the Tianjin Key Research Program of Application Foundation and Advanced Technology,China (No.11JCZDJC15300).
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