电子与封装Issue(10)：40-43,4.
一种MEMS热驱动可变电容的分析模拟
Analyse and Simulation of a Thermal Variable MEMS Capacitor
陈立军 1沈娇艳 2雷鸣 1陈杰 1唐剑平3
作者信息
- 1. 无锡纳能科技有限公司，江苏无锡214000
- 2. 苏州科技学院数理学院，江苏苏州，215000
- 3. 中国电子科技集团公司第58研究所，江苏无锡214035
- 折叠
摘要
Abstract
In this paper, we designed and analyzed a Micro Electro Mechanical Systems (MEMS) thermal variable capacitor, which down capacitor plate was fixed on the substrate while the up plate was driven by a thermal micro actuator. The actuator was composed of cold and hot arms, which one side ends were fixed on the substrate and other ends were connected to the up plate of MEMS capacitor. The actuator moved up and down with the input electrical voltage. The displacement and temperature of the capacitor with different hot arm length from 150μm to 300μm and different drive voltage from 0 to 4 V were calculated by Finite Element Analysis (FEA) method. The FEA results show that the max tuning ratio of capacitance can reach 10.关键词
MEMS设计/有限元分析/可变电容/热执行器Key words
MEMS design/finite element analysis/variable capacitor/thermal actuator分类
机械制造引用本文复制引用
陈立军,沈娇艳,雷鸣,陈杰,唐剑平..一种MEMS热驱动可变电容的分析模拟[J].电子与封装,2013,(10):40-43,4.
