电子与封装Issue(4)：46-48,3.
氨水、双氧水转国产化应用
Indigenous Application of Ammonia Solution and Hydrogen Peroxide
马慧红 1吴晓鸫 1顾爱军1
作者信息
- 1. 中国电子科技集团公司第58研究所，江苏无锡 214035
- 折叠
摘要
Abstract
Chemicals are important materials in microeletronic manufacture wet bench process. Foreign chemicals are widely used in high-level foundry in preliminary period as its exigent requirement. With the quality improvement of indigenous chemical suppliers, more and more domestic chemicals are in substitutional application. High level quality is required in microelectronic process, as a result, long period of time is need for domestic transformation. In the article, it is introduced two kind of solutions, Ammonia Solution and Hydrogen Peroxide. Comparisons of foreign and domestic solution are made in purities, process abilities and products usage. It comes to the conclusion that the substitution of domestic for foreign solution is available.关键词
纯度/金属离子/栅氧质量/良率Key words
purity/metal ion/gate oxide quality/yield分类
信息技术与安全科学引用本文复制引用
马慧红,吴晓鸫,顾爱军..氨水、双氧水转国产化应用[J].电子与封装,2015,(4):46-48,3.
