电子元件与材料Issue(2)：38-42,5.DOI:10.14106/j.cnki.1001-2028.2015.02.010
VHF频段三角形微机电谐振器的分析与设计
Analysis and design of trilateral micro electro-mechanical system resonator in VHF band
摘要
Abstract
A novel micro electromechanical system(MEMS) resonator working in VHF band was designed;the method reducing the resonator motional resistance was used by using an array form. This resonator was analyzed by ANSYS. Results show that compared with degrading the electrode-to-resonator gap and raising the DC-bias voltage, the method can degrade the motional resistance and increase power capability. The array of resonators has characteristics such as high quality factor, low energy loss and small motional resistance under the condition of invariable resonant frequency. Both of the operation frequency of the resonator and the array of resonators are 123 MHz.关键词
谐振器/ANSYS/微机电/动态电阻/品质因数/阵列Key words
resonator/ANSYS/MEMS/motional resistance/quality factor/array分类
信息技术与安全科学引用本文复制引用
贾英茜,徐淑壹,李宁,高彦彦..VHF频段三角形微机电谐振器的分析与设计[J].电子元件与材料,2015,(2):38-42,5.基金项目
石家庄市科技支撑计划课题支持资助项目 （）
