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应变补偿InGaN/AlGaN超晶格改善近紫外LED性能

尹以安 章勇 范广涵 李述体

电子元件与材料Issue(8):42-46,5.
电子元件与材料Issue(8):42-46,5.DOI:10.14106/j.cnki.1001-2028.2015.08.011

应变补偿InGaN/AlGaN超晶格改善近紫外LED性能

Near-UV LED photoelectric properties of strain-compensated InGaN/AlGaN superlattice layers

尹以安 1章勇 2范广涵 1李述体2

作者信息

  • 1. 华南师范大学 光电子材料与技术研究所,广东 广州 510631
  • 2. 广东省光电功能材料与器件工程技术研究中心,广东 广州 510631
  • 折叠

摘要

Abstract

The strain-compensated In0.1Ga0.9N/Al0.2Ga0.8N superlattice structure was designed by strain equilibrium theory. To verify the structure with low stress, p-InGaN/p-AlGaN superlattice lattice layers (SLs) with a strain-compensated structure was fabricated by epitaxial growth technology, and low stress in the structure was verified by double-crystal x-ray diffraction (XRD) and Raman spectroscopy (Raman). The experimental results show that the near-UV LEDs with strain-compensated In0.1Ga0.9N/Al0.2Ga0.8N SLs have higher emission power over their conventional counterparts with GaN barriers due to the mitigation of the quantum-confined Stark effect and the suppression of electron leakage. Furthermore, the performances of the near-UV LEDs with proposed InGaN/AlGaN barriers can be further improved without electron blocking layers.

关键词

应变平衡/InGaN/AlGaN超晶格/应变补偿/极化效应/p型欧姆接触电阻/近紫外LED

Key words

strain equilibrium/InGaN/AlGaN superlattice layers (SLs)/strain compensated/polarization effect/p-type ohmic contanct resistance/near-UV LEDs

分类

信息技术与安全科学

引用本文复制引用

尹以安,章勇,范广涵,李述体..应变补偿InGaN/AlGaN超晶格改善近紫外LED性能[J].电子元件与材料,2015,(8):42-46,5.

基金项目

国家自然科学基金项目资助(No.61176043);广州市科技计划项目资助(No.201510010229;No.2014J4100056);广东省科技计划资助项目 ()

电子元件与材料

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1001-2028

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