电子元件与材料Issue(10)：64-67,4.DOI:10.14106/j.cnki.1001-2028.2015.10.016
微型热导检测器的结构设计研究
Design and research of micro thermal conductivity detector structure
摘要
Abstract
Based on MEMS technology, a novel structural micro thermal conductivity detector was designed. High resistivity, high temperature coefficient thermistors were chosen as elements, the four beam straight form was used as the structural model, the heat dissipation properties of the detector’s structural materials were simulated and analyzed, the micro thermal conductivity detector was fabricated using polyimide as the adiabatic player which had the minimum heat loss. The test results indicate that the max detection error of the volume fraction of 85% of standard gas is 0.068% by using this detector, whose sensitivity is about 25% higher than that of traditional thermal conductivity detector.关键词
热导检测器/热敏元件/MEMS技术/灵敏度/热耗散/结构Key words
thermal conductivity detector/thermistor element/MEMS technology/sensitivity/heat dissipation/structure分类
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冉莹玲,靳斌..微型热导检测器的结构设计研究[J].电子元件与材料,2015,(10):64-67,4.基金项目
西华大学研究生创新基金 （）
