电子元件与材料Issue(12)：14-19,6.DOI:10.14106/j.cnki.1001-2028.2015.12.004
氧化镓纳米棒的超声法制备及湿敏特性研究
Humidity sensor based on Ga 2O3 nanorods prepared by ultrasonic assistance
摘要
Abstract
Ga2O3 nanorods were prepared from commercial GaN powder via a simple ultrasonic assistance method, and they were characterized by X-ray diffraction (XRD), field-emission scanning electron microscopy (FE-SEM) and transmission electron microscope (TEM). The as-prepared Ga2O3 nanorods are of diameters 100 nm and lengths 2μm, and they are doped with Na+ and K+, successfully. The thickfilm humidity sensors were prepared by spin-coating the sensing materials on Al2O3 ceramic substrates coated with Ag-Pd interdigitated electrodes and the humility sensing properties were studied. The impedance variation of Ga2O3 nanorods sensor with the humility exhibits good linearity response over four orders of magnitude, when relative humility (RH) changes from 11% to 95% at 100 Hz. The response time and recovery time are about 1 s and 6 s and the maximum hysteresis is only 3%RH at 100 Hz. The good humility sensing properties may be attributed to the synergistic effect of one-dimensional of Ga2O3 nanostructures and the ions doping.关键词
Ga2O3纳米棒/湿度传感器/离子掺杂/GaN粉末/超声合成/湿敏特性Key words
Ga2O3 nanorods/humidity sensors/doping of ions/GaN powder/ultrasonic synthesis/humility sensing properties分类
通用工业技术引用本文复制引用
娄彦龙,王丁,王朋朋,郑学军..氧化镓纳米棒的超声法制备及湿敏特性研究[J].电子元件与材料,2015,(12):14-19,6.基金项目
国家自然科学基金资助项目 （）
