电子元件与材料2016，Vol.35Issue(3)：40-43,4.DOI:10.14106/j.cnki.1001-2028.2016.03.010
基于PVDF的柔性压力传感器阵列的制备及仿真研究
Preparation and simulation for flexible pressure sensor array based on poly(vinylidene fluoride) film
摘要
Abstract
Flexible 4×4 sensor array with 16 capacitor units in micro scale was fabricated by etching based on a piezoelectric PVDF film. The morphology of the sensor array was studied by an optical microscope and atomic force microscope, the results show that the sensor array based on PVDF film has a smooth surface with a clear interface of electrodes. Electro-mechanical properties of the sensor were examined as well, the results show a high signal to noise ratio and good linear property of 12×10–3V /kPa. The hold-and-release output response of the sensor was obtained by applying impulse pressures which indicated that the sensor array could generate 0.26-0.98 V voltage signals in less than 2.5 milliseconds under the applied pressure range of 20-80 kPa. Combining simulation, the potential signal impact of the adjacent units was studied. The results show that the signal interference between the array units increases with the pressure on the sensor, which shows a linear relationship with the interference signal of 0.028×10–3V/kPa. The generated signal interference could be ignored within the pressure of 178 kPa at the unit size of 1.4 mm2.关键词
PVDF薄膜/刻蚀/柔性/传感器/阵列/仿真Key words
PVDF film/etching/flexibility/sensor/array/simulation分类
通用工业技术引用本文复制引用
卢凯,黄文,刘思祎,李响,林媛,冯雪..基于PVDF的柔性压力传感器阵列的制备及仿真研究[J].电子元件与材料,2016,35(3):40-43,4.基金项目
北京邮电大学开放课题基金资助（No. IPOC2013B006）；中央高校基本科研业务费专项资金资助（No. ZYGX2013J040）；国家重点基础研究发展计划（973计划）资助 （）
