电子元件与材料2017，Vol.36Issue(2)：40-44,5.DOI:10.14106/j.cnki.1001-2028.2017.02.009
3D表面碳纳米管薄膜的生长及其强流脉冲发射的增强
Growth of CNT films on tridimensional surface and improvement on intense pulsed emission characteristics
摘要
Abstract
Three dimensional carbon nanotube films(3D-CNTs) were synthesized on micro-structure of tridimensional Si substrate with Ni layer by chemical vapor deposition(CVD). The CNT forest on the micro-structure surface are uniform, well aligned, and perpendicular to the substrate. In order to study the intense pulsed emission characteristics of CNTs cold cathode, the intense pulsed emission characteristics of CNTs cold cathode were measured repeatedly with a diode structure using a Marx generator as a voltage(under the same diode voltage discharge)source. Itis found that 3D-CNTs (grown on tridimensional substrate)cold cathode can offer not only higher emission peak current and current densities, but also better stability than planar-grown CNTs(P-CNTs)cold cathode.关键词
碳纳米管/强流脉冲发射/3D微结构/稳定性/气相化学沉积/湿法刻蚀Key words
carbon nanotubes/intense pulsed emission/3Dmicro-structure/stability/chemical vapor deposition/wet etching分类
数理科学引用本文复制引用
麻华丽,曾凡光,夏连胜,谌怡,张篁..3D表面碳纳米管薄膜的生长及其强流脉冲发射的增强[J].电子元件与材料,2017,36(2):40-44,5.基金项目
国家自然科学基金资助（No.11404291）、航空科学基金项目（No.12014ZF55013,2015ZF55013）；河南省科技创新杰出人才项目（No.1164200510006）；河南省高等学校重点科研项目计划(No.115A140042) （No.115A140042）
