电子元件与材料2017，Vol.36Issue(4)：32-36,5.DOI:10.14106/j.cnki.1001-2028.2017.04.006
MPCVD金刚石膜的品质对其在K-Ka波段微波介电性能的影响
Effect of qualities of MPCVD diamond film on microwave dielectric properties in K-Ka band
摘要
Abstract
A K band split-cylinder resonator device was developed to measure dielectric properties of diamond films prepared by microwave plasma chemical vapor deposition (MPCVD),and the results were compared with the measured by using Ka band split-cylinder resonator device.The quality of diamond films was analyzed by Raman spectroscopy.It shows that,dielectric loss ranges from 3.8 × 10-5 to 76.8× 10-5,depending on the quality measured by Raman spectroscopy.Moreover,due to electrical conductivity of diamond film,the dielectric loss of high quality diamond film at K band is obviously higher than that at Ka band,and due to one-phonon excitation of acoustic vibrations or Rayleigh scatterings,the dielectric loss of poor quality diamond film presents a contrary tendency.关键词
MPCVD金刚石膜/拉曼光谱/品质/分体圆柱谐振腔/介电性能/K-Ka波段Key words
MPCVD diamond films/Raman spectra/quality/split-cylinder resonator/dielectric property/K-Ka band分类
化学化工引用本文复制引用
刘艳青,丁明辉,苏静杰,李义峰,唐伟忠..MPCVD金刚石膜的品质对其在K-Ka波段微波介电性能的影响[J].电子元件与材料,2017,36(4):32-36,5.基金项目
国家磁约束核聚变能专项资助(No.2013GB110003) （No.2013GB110003）
