电子元件与材料2017，Vol.36Issue(4)：56-59,70,5.DOI:10.14106/j.cnki.1001-2028.2017.04.011
Si掺杂SnO2基气体传感器抗湿性能研究
Research on anti-humidity of Si-doped SnO2 gas sensor
摘要
Abstract
Si-doped SnO2 was taked as reference element material of hot-wire type gas sensor to improve the ability of anti-humidity.Si-doped SnO2 as the reference element material and Sb-doped SnO2 as the sensitive element material were prepared by eoprecipitation method,and the materials were characterized.Meanwhile,the effect of the Sb content on sensor response and the effect of Si-doped SnO2 on anti-humidity were investigated.Also the mechanism of anti-humidity was discussed.The results show that the sensor response to 1000× 10-6 (volume fraction) of H2 is improved from 108 mV to 435 mV when the mole ratio of Sb to Sn is 6％,and the relative error of sensor response reduces to 8.8％ caused by humidity when the mole ratio of Si to Sn is 0.7％.关键词
电子技术/SnO2/热线型气体传感器/Si掺杂量/湿度/H2Key words
electronic technigue/SnO2/hot-wire type gas sensor/Si doping content/humidity/H2分类
信息技术与安全科学引用本文复制引用
陈克城,詹自力,陈翔宇,闫贺艳,陈志强..Si掺杂SnO2基气体传感器抗湿性能研究[J].电子元件与材料,2017,36(4):56-59,70,5.基金项目
河南省产学研合作项目资助(No.162107000015) （No.162107000015）
河南省教育厅重点项目资助(No.14A530001) （No.14A530001）
