首页|期刊导航|半导体学报(英文版)|A novel polishing technology for epoxy resin based on 355 nm UV laser

A novel polishing technology for epoxy resin based on 355 nm UV laserOACSCDCSTPCD

A novel polishing technology for epoxy resin based on 355 nm UV laser

Xinling Meng;Luqi Tao;Zhaolin Liu;Yi Yang;Tianling Ren

Institute of Microelectronics and Tsinghua National Laboratory for Information Science and Technology(TNList), Tsinghua University, Beijing 100084, ChinaShandong Senspil Electronic Technology Co., Ltd., Shandong 250107, ChinaInstitute of Microelectronics and Tsinghua National Laboratory for Information Science and Technology(TNList), Tsinghua University, Beijing 100084, ChinaShandong Senspil Electronic Technology Co., Ltd., Shandong 250107, ChinaInstitute of Microelectronics and Tsinghua National Laboratory for Information Science and Technology(TNList), Tsinghua University, Beijing 100084, China

laser polishingepoxy resinsurface quality

laser polishingepoxy resinsurface quality

《半导体学报(英文版)》 2017 (5)

石墨烯对X射线辐射响应特性及机理研究

99-105,7

Project supported by the National Natural Science Foundation of China (Nos.61574083,61434001),the National Basic Research Program (No.2015CB352100),the National Key Project of Science and Technology (No.2011ZX02403-002),the Special Fund for Agroscientic Research in the Public Interest of China (No 201303107),the support of the Independent Research Program of Tsinghua University (No.2014Z01006),and Advanced Sensor and Integrated System Lab of Tsinghua University Graduate School at Shenzhen (No.ZDSYS20140509172959969).

10.1088/1674-4926/38/5/056001

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