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无压烧结SiC-AlN复相陶瓷导热和介电性能的研究

王玉春 杨群 潘勃

电子元件与材料2017,Vol.36Issue(5):6-11,6.
电子元件与材料2017,Vol.36Issue(5):6-11,6.DOI:10.14106/j.cnki.1001-2028.2017.05.002

无压烧结SiC-AlN复相陶瓷导热和介电性能的研究

Thermal conductivity and dielectric properties of SiC-AlN composites by pressureless sintering

王玉春 1杨群 2潘勃2

作者信息

  • 1. 南京三乐电子信息产业集团有限公司,江苏 南京 210032
  • 2. 南京工业大学 材料科学与工程学院,江苏 南京 210009
  • 折叠

摘要

Abstract

SiC-AlN composites with 10% (mass fraction) BaO-SiO2-Y2O3 additives were fabricated by pressureless sintering in a nitrogen atmosphere. The effects of SiC content and sintering temperature on the sinterability, microstructure, thermal conductivity and high-frequency dielectric properties were characterized. In addition to 6H-SiC and AlN, the samples also contain Y3Al5O12 and Y4Al2O9. The apparent porosity of sample with the mass fraction of 50%SiC sintered at 1850 ℃ for 1 h is lower than 0.3%. With the increasing of SiC content , the apparent porosity is increased significantly. Thermal conductivity, dielectric constant and dielectric loss increase with the raising of sintering temperature. SiC-AlN ceramics sintered with 50% (mass fraction) SiC at 1900 ℃ exhibite the best thermal diffusivity and thermal conductivity, respectively 26.3 mm2·s–1 and 61.5 W·m–1·K–1. The relative dielectric constant and dielectric loss of the sample sintered with 50% mass fraction SiC at 1850 ℃ are 33-37 and 0.4-0.5 at 12.4-18 GHz. The dielectric constant and dielectric loss of the samples decrease as the frequency of electromagnetic waves rise from 12.4 GHz to 18 GHz.

关键词

SiC-AlN/无压烧结/BaO-SiO2-Y2O3烧结助剂/氮气氛/热导率/介电性能

Key words

SiC-AlN/presureless sintering/BaO-SiO2-Y2O3 additives/nitrogen atmosphere/thermal conductivity/dielectric properties

分类

信息技术与安全科学

引用本文复制引用

王玉春,杨群,潘勃..无压烧结SiC-AlN复相陶瓷导热和介电性能的研究[J].电子元件与材料,2017,36(5):6-11,6.

基金项目

江苏高校优势学科建设工程项目 ()

长江学者和创新团队发展计划资助项目(No.IRT1146) (No.IRT1146)

电子元件与材料

OA北大核心CSCDCSTPCD

1001-2028

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