机器人2017，Vol.39Issue(5)：595-602,8.DOI:10.13973/j.cnki.robot.2017.0595
基于压电薄膜驱动的微定位平台建模与分析
Modeling and Analysis of a Piezoelectric-film Driven Micro-positioning Stage
摘要
Abstract
A flexure hinge based 3-DOF (degree of freedom) micro-positioning stage is designed, which is driven by piezoelectric-film beam. In order to accurately predict the performance of the micro-positioning stage, a theoretical modeling and analysis method is further proposed. The output model of the piezoelectric-film beam is first established on the basis of Euler-Bernouli beam theory and the piezoelectric constitutive equation under force balance conditions. Based on the compliance matrix method, the compliance model of the micro-positioning stage is then built. Accordingly, the output model of the micro-positioning stage is derived by incorporating the piezoelectric-film beam model and the mechanism compliance model. By FEA (finite-element-analysis), the displacement and rotation angle output by the micro-positioning stage are analyzed, and compared with the theoretical computation results. The comparison results show that the maximum deviations between the theoretical and simulation results are 5.4% for translation and 5.5% for rotation when only one piezoelectric-film actuator works, and the maximum deviation for output displacements is 11.6% when the three piezoelectric-film actuators work together.关键词
压电薄膜/柔性铰链/微定位平台/柔度矩阵方法/有限元分析Key words
piezoelectric-film/flexure hinge/micro-positioning stage/compliance matrix method/finite element analysis分类
机械制造引用本文复制引用
庞建伟,闫鹏..基于压电薄膜驱动的微定位平台建模与分析[J].机器人,2017,39(5):595-602,8.基金项目
国家自然科学基金(61327003) （61327003）
山东大学基础研究基金(2015JC034). （2015JC034）
