电子元件与材料2017，Vol.36Issue(11)：38-42,5.DOI:10.14106/j.cnki.1001-2028.2017.11.007
一种用于MEMS加速度传感器的低功耗低噪声全差分电路
A low power, low noise fully differential circuit for MEMS acceleration sensor
摘要
Abstract
A low power and low noise with fully differential circuit for MEMS acceleration sensor was described. Folded cascode structure was adopted for the sake of increasing output impedance, decreasing power and reducing noise. In this way, proper common mode feedback structure compensates the loop circuit, avoids the output signal's distortion, ensures that phase margin is better and gets a quicker response.Based on 0.5 μm CMOS process, the results of Cadence Spectre circuit simulation show that when supply voltage is 5 V, the noise of circuit is 5.777891 μV·Hz–1/2 and the power reaches 41.768 mW in the frequency range from 0.1 Hz to 100 MHz. In addition, the area of layout is 1834.18μm×1446.87 μm. For the specific performance, it can be used in earthquake forecast, oil detection and so on.关键词
低功耗/低噪声/全差分电路/套筒式/共模反馈/版图Key words
low power/low noise/fully differential circuit/folded cascode/common mode feedback/layout分类
信息技术与安全科学引用本文复制引用
张航,金湘亮,杨柳..一种用于MEMS加速度传感器的低功耗低噪声全差分电路[J].电子元件与材料,2017,36(11):38-42,5.基金项目
国家自然科学基金资助项目(No.61274043 （）
No.61233010) （）
