电子元件与材料2017，Vol.36Issue(11)：43-46,4.DOI:10.14106/j.cnki.1001-2028.2017.11.008
混合集成薄膜电阻的误差来源分析及修正方法
Resistance deviation analysis and correction of resistor in hybrid integrated circuit
王春富 1秦跃利1
作者信息
- 1. 中国电子科技集团公司第二十九研究所,四川 成都 610036
- 折叠
摘要
Abstract
Thin film based hybrid integrated circuits are widely used in high frequency area like microwave/millimeter waves devices, for these applications, a high accuracy of the integrated resistance value is indispensable. However, it could not be well satisfied by the state-of-art. To solve this problem, this paper investigated the fabrication process of thin film resistance and the source of error was verified. With studying the relation between pattern width and the value of resistance, the variation regularity of resistance value error was ascertained. A new method of resistance pattern width amendment was proposed and a precise control of thin film resistance value was achieved.关键词
混合集成电路/毫米波/薄膜电路/薄膜电阻/电阻误差/修正方法Key words
hybrid integrated circuits/millimeter waves/thin film based circuits/thin film resistance/resistance value error/amendment method分类
信息技术与安全科学引用本文复制引用
王春富,秦跃利..混合集成薄膜电阻的误差来源分析及修正方法[J].电子元件与材料,2017,36(11):43-46,4.
