电子与封装2024，Vol.24Issue(1)：73-77,5.DOI:10.16257/j.cnki.1681-1070.2024.0014
基于ASM E2000外延炉温控系统的电压校准研究
Voltage Calibration Study Based on ASM E2000 Epitaxial Furnace Temperature Control System
徐卫东 1任凯 1何晶 1肖健 1冯萍2
作者信息
- 1. 南京国盛电子有限公司,南京 211111
- 2. 南京洛普股份有限公司,南京 210032
- 折叠
摘要
Abstract
The ASM E2000 epitaxial furnace uses silicon controlled rectifier(SCR)to control the input voltage of the heating lamps,and is heated by using thermocouple(TC)to monitor and feedback the temperature.In the heating system of this model,the calibration accuracy of each voltage determines the temperature accuracy of the system control.The temperature control system under this study can be divided into TC circuit boards and SCR circuit boards.For the voltage calibration of the TC signal processing board,the calibration accuracy should be±0.01 V.For the voltage calibration of the SCR control signal,the calibration accuracy should be±0.001 V.For the voltage calibration of the SCR output,the incoming voltage should be prioritized to measure,adjustments should be made according to the specific situation of the load and the incoming voltage,and the calibration accuracy should be±1 V.This calibration method can effectively and accurately control the growth temperature,minimize the variability between machines,and improve the standardization ability of machines.关键词
可控硅/热电偶/温度控制/电压调整/ASM E2000外延炉Key words
silicon controlled rectifier/thermocouple/temperature control/voltage adjustment/ASM E2000 epitaxial furnace分类
信息技术与安全科学引用本文复制引用
徐卫东,任凯,何晶,肖健,冯萍..基于ASM E2000外延炉温控系统的电压校准研究[J].电子与封装,2024,24(1):73-77,5.
