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含ZnO的TiO2压敏器件的失效分析

陈赟 周军连 贾豪 胡永达

电子元件与材料2023,Vol.42Issue(11):1320-1323,4.
电子元件与材料2023,Vol.42Issue(11):1320-1323,4.DOI:10.14106/j.cnki.1001-2028.2023.0246

含ZnO的TiO2压敏器件的失效分析

Failure analysis of TiO2 varistor devices containing ZnO

陈赟 1周军连 2贾豪 1胡永达1

作者信息

  • 1. 电子科技大学 集成电路科学与工程学院, 四川 成都 611731
  • 2. 工业和信息化部电子第五研究所, 广东 广州 510610
  • 折叠

摘要

Abstract

When zinc oxide is doped into oxide titanium varistor ceramic devices and subjected to sintering,the observation reveals the precipitation of zinc oxide and the formation of zinc oxide whiskers on the surface of the device,leading to failure of the device.With in-depth analysis,we have concluded that the fundamental cause of this issue is that the carbon particles deposited on the sintering furnace wall fell off and then adhered to the surface of the ceramic device,resulting in reducing atmosphere in that specific area.This reducing atmosphere has induced the reduction of the zinc oxide into liquid zinc,which subsequently rise up to the surface of the ceramic device and re-oxidized into dark zinc oxide spots.With the evaporation and re-oxidation of the liquid zinc,selectively grows on the zinc oxide nuclei happened and formed zinc oxide whiskers.This result contributes to a deeper understanding of the failure behavior in ceramic devices containing zinc oxide.

关键词

氧化锌/还原性气氛/暗斑/晶须

Key words

zinc oxide/reductive atmosphere/dark spot/whisker

分类

信息技术与安全科学

引用本文复制引用

陈赟,周军连,贾豪,胡永达..含ZnO的TiO2压敏器件的失效分析[J].电子元件与材料,2023,42(11):1320-1323,4.

基金项目

四川省重点研发项目(2023YFG0215) (2023YFG0215)

电子元件与材料

OA北大核心CSTPCD

1001-2028

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