电子元件与材料2023，Vol.42Issue(11)：1329-1334,6.DOI:10.14106/j.cnki.1001-2028.2023.0038
腐蚀箔隧道孔侧壁电流密度对锥度的影响
Revealing the effect of sidewall current on the tunnel structure of aluminum foil in DC etching
闫小宇 1何凤荣 1陈锦雄 2罗向军 2邓利松3
作者信息
- 1. 东莞东阳光科研发有限公司, 广东 东莞 523871||乳源瑶族自治县东阳光化成箔有限公司,广东 韶关 512721
- 2. 乳源瑶族自治县东阳光化成箔有限公司,广东 韶关 512721
- 3. 东莞东阳光科研发有限公司, 广东 东莞 523871
- 折叠
摘要
Abstract
The influence of sidewall current density on the taper of aluminum foil tunnel of high voltage electrolytic capacitor was studied by electrochemical testing,morphology characterization and density functional theory calculation.The results show that the sidewall and the tip current density are both proportional to the growth rate,which indicates that they are essentially the same in DC corrosion.Sidewall current has a significant impact on the tunnel structure.Although this current is small,it will lead to a pronounced tunnel taper.Therefore,it may improve the tapered structure by reducing the sidewall current density during tunnel growth.As a proof of concept,an appropriate amount of H3PO4 was added to the HCl-H2SO4 etching solution.The polarization results show that the current density of tunnel growth can be significantly reduced,thereby improving the tunnel taper.关键词
高压电解电容器/侧壁电流密度/隧道锥度/极化曲线/扫描电镜Key words
high voltage electrolytic capacitor/side current density/tunnel taper/polarization curve/SEM分类
信息技术与安全科学引用本文复制引用
闫小宇,何凤荣,陈锦雄,罗向军,邓利松..腐蚀箔隧道孔侧壁电流密度对锥度的影响[J].电子元件与材料,2023,42(11):1329-1334,6.
