无机材料学报2024，Vol.39Issue(3)：233-258,26.DOI:10.15541/jim20230386
化学气相沉积法制备智能窗用热致变色VO2薄膜的研究进展
Chemical Vapor Deposition of Vanadium Dioxide for Thermochromic Smart Window Applications
摘要
Abstract
Smart windows have gained tremendous attention because of their ability to dynamically modulate the solar radiation to minimize energy consumption and improve indoor living comfort.Vanadium dioxide(VO2)is one of the most attractive thermochromic materials for energy-saving smart windows due to its reversible metal-to-insulator transition at a critical temperature of～68℃and accompanying great change of its optical transmittance.However,VO2 itself has a couple of significant limitations as a smart window material:high phase transition temperature(τc),low luminous transmittance(Tlum)and insufficient solar energy modulation ability(ΔTsol).Several methods have been used to grow VO2 thin films with improved properties to meet the specific requirements for smart windows applications.The phase transition temperature(τc)should be reduced to near room temperature,in the meantime luminous transmittance(Tlum)and solar energy modulation ability(ΔTsol)should be high enough for the modulation of indoor temperature self-adapted to seasons and climate.The most common way to reduce τc is by doping.To enhance Tlum and ΔTsol,multilayer structures and/or nanocomposite film have been widely adopted.Chemical vapor deposition(CVD)is a promising technique to produce high quality and highly uniform VO2 thin film with different morphologies in large scale and at low costs.In this paper,various CVD techniques,such as atmospheric pressure chemical vapor deposition(APCVD),aerosol-assisted chemical vapor deposition(AACVD),low-pressure chemical vapor deposition(LPCVD),metal-organic chemical vapor deposition(MOCVD),atomic layer deposition(ALD)and plasma-enhanced chemical vapor deposition(PECVD),are examined with respect to their advantages for VO2 deposition,film quality and the strategies for film quality improvement.Finally,challenges and opportunities for further research and development of VO2 thermochromic films using PECVD technique are emphasized.关键词
二氧化钒/热致变色/智能窗/化学气相沉积/薄膜/综述Key words
vanadium dioxide/thermochromism/smart window/chemical vapor deposition/thin film/review分类
化学化工引用本文复制引用
鲍可,李西军..化学气相沉积法制备智能窗用热致变色VO2薄膜的研究进展[J].无机材料学报,2024,39(3):233-258,26.基金项目
西湖大学微纳平台建设专项经费(201046011801)Operation Fund of Westlake Center for Micro/Nano Fabrication(201046011801) （201046011801）
