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Crafting chirality in three dimensions via a novel fabrication technique for bound states in the continuum metasurfacesOA北大核心CSTPCD

Crafting chirality in three dimensions via a novel fabrication technique for bound states in the continuum metasurfaces

英文摘要

An additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces,which is essential for the geometric design of intrinsically chiral structures.

Zaid Haddadin;Anna My Nguyen;Lisa V.Poulikakos

Department of Electrical & Computer Engineering,University of California San Diego,La Jolla,CA,USADepartment of Mechanical & Aerospace Engineering,University of California San Diego,La Jolla,CA,USADepartment of Mechanical & Aerospace Engineering,University of California San Diego,La Jolla,CA,USA||Program of Materials Science & Engineering,University of California San Diego,La Jolla,CA,USA

《光:科学与应用(英文版)》 2024 (003)

390-392 / 3

10.1038/s41377-023-01368-z

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