计量学报2024，Vol.45Issue(3)：332-339,8.DOI:10.3969/j.issn.1000-1158.2024.03.05
基于贝叶斯动态模型的激光干涉仪漂移误差预测
Drift Error Prediction of Laser Interferometer Based on Bayesian Dynamic Model
刘丽颖 1程真英 1陈旭 1李瑞君1
作者信息
- 1. 合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室,安徽合肥 230009
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摘要
Abstract
Aiming at the drift problem of laser interferometer during long time measurement,a drift error prediction method based on Bayesian dynamic model is proposed.By collecting the drift error sequence of the non-measurement stage,the data characteristics are analyzed and a Bayesian dynamic model is established.Then,the initial information required for recursion is obtained by using the non-information prior distribution method,and the state parameters of the model are trained and estimated by the Bayesian recursive algorithm.Finally,the drift error prediction effect has been verified by experiments based on the Michelson laser interferometer made in the laboratory.The results show that the mean square error of the compensated residual drift error is reduced by 67.85％and 99.08％,respectively,compared with the usual least squares fitting method and neural network modeling method.According to the prediction results of repeated experiments,the mean square error of residual drift error is reduced by more than 82％compared with that before compensation.The validity and robustness of the proposed drift error prediction method based on Bayesian dynamic model are verified.关键词
几何量计量/漂移误差/误差预测/贝叶斯动态模型/激光干涉仪Key words
geometric metrology/drift error/error prediction/Bayesian dynamic model/laser interferometer分类
通用工业技术引用本文复制引用
刘丽颖,程真英,陈旭,李瑞君..基于贝叶斯动态模型的激光干涉仪漂移误差预测[J].计量学报,2024,45(3):332-339,8.
