人工晶体学报2024，Vol.53Issue(3)：426-433,8.
晶圆级薄膜铌酸锂波导制备工艺与性能表征
Fabrication and Characterization of Wafer-Scale Thin-Film Lithium Niobate Waveguides
摘要
Abstract
With the rapid development of photonic integration and optical communication technology,low-loss waveguides have become the key components for efficient photonic transmission,and their performance directly affects the performance ofthe entire integrated chip.Therefore,the preparation technology of low-loss thin film lithium niobate(TFLN)waveguides is currently a hot and difficult research topic.In this study,in-depth research on the preparation process of wafer-level low-loss thin-film lithium niobate waveguides was conducted.On a 4-inch thin-film lithium niobate wafer,waveguides witha transmission loss of less than 0.15 dB/cm based on the deep-UV lithography and inductive coupled plasma etching were successfully prepared,while the etching depth error was controlled within 10％,greatly improving the accuracy of the waveguide structure.Additionally,this study also proposed a characterization method based on micro-ring resonators for wafer-level waveguide loss measurement,which can more accurately evaluate waveguide performance.Through testing,it is found that the qualified rate of the prepared waveguides exceeds 85％,demonstrating good reproducibility and reliability.The wafer-level thin film lithium niobate processing technology developed in this article is of great significance for promoting the large-scale preparation and application of lithium niobate waveguides.关键词
薄膜铌酸锂/晶圆级加工/波导损耗测量/深紫外光刻/ICP刻蚀/集成光子技术Key words
thin-film lithium niobate/wafer-scale process/waveguide loss measurement/deep ultraviolet lithography/ICP etching/integrated photon technique分类
数理科学引用本文复制引用
叶志霖,李世凤,崔国新,尹志军,王学斌,赵刚,胡小鹏,祝世宁..晶圆级薄膜铌酸锂波导制备工艺与性能表征[J].人工晶体学报,2024,53(3):426-433,8.基金项目
国家重点研发计划(2022YFA1205100,2022YFF0712800) （2022YFA1205100,2022YFF0712800）
国家自然科学基金(92163216,92150302,62288101,12192251) （92163216,92150302,62288101,12192251）
江苏省前沿引领技术基础研究专项(BK20192001) （BK20192001）
