电子学报2024,Vol.52Issue(4):1389-1398,10.DOI:10.12263/DZXB.20231180
基于GaN/Ti3C2Tx的TMA传感器气敏性能及其应用研究
Research on Gas Sensing Performance and Application of TMA Sensor Based on GaN/Ti3C2Tx
摘要
Abstract
In this paper,a new type of gallium nitride(GaN)/Ti3C2Tx composite material was synthesized by solvo-thermal method and nitriding method,and the sensing characteristics of trimethylamine(TMA)gas sensor based on GaN/Ti3C2Tx composite were studied.Through a series of characterization methods,the morphology and elemental composition of the composites were analyzed,and the successful composite of GaN and Ti3C2Tx was confirmed.The results show that GaN/Ti3C2Tx sensor can efficiently detect 1~200 ppm TMA gas at room temperature,and the detection limit of TMA is re-duced from 10 ppm to 1 ppm compared with pure GaN sensor.In addition,the gas sensing results of the composite sensor further confirm its good anti-interference characteristics and long-term stability.The gas-sensitive mechanism of GaN/Ti3C2Tx composite sensor and the reason of its improved gas-sensitive performance compared with pure GaN sensor are ex-plained by using the surface depletion layer model.Finally,a contactless TMA gas detection device was developed in this paper,and the test results show that the device is expected to achieve efficient real-time detection of exhaled air in patients with liver and kidney disease,and has great application potential in early screening of liver and kidney diseases.关键词
GaN/Ti3C2Tx/室温/三甲胺/气体传感器/无接触检测Key words
GaN/Ti3C2Tx/room temperature/trimethylamine/gas sensor/contactless detection分类
信息技术与安全科学引用本文复制引用
韩丹,洪宇涛,刘志华,段奇,李栋辉,王雨,史杰旭,桑胜波..基于GaN/Ti3C2Tx的TMA传感器气敏性能及其应用研究[J].电子学报,2024,52(4):1389-1398,10.基金项目
国家自然科学基金(No.52375572,No.62031022) (No.52375572,No.62031022)
山西省重点研发计划项目(No.202102030201003) (No.202102030201003)
山西省水利科学技术研究推广项目(No.2023GM16) (No.2023GM16)
山西浙大新材料与化工研究院研发项目(No.2022SX-AT001) National Natural Science Foundation of China(No.52375572,No.62031022) (No.2022SX-AT001)
Key Research and Development Program of Shanxi Province(No.202102030201003) (No.202102030201003)
Water Resources Department Program of Shanxi Province(No.2023GM16) (No.2023GM16)
Shanxi-Zheda Institute of Advanced Materials and Chemical Engineering(No.2022SX-AT001) (No.2022SX-AT001)