电子元件与材料2024，Vol.43Issue(5)：625-630,6.DOI:10.14106/j.cnki.1001-2028.2024.1391
内部气氛含量分析环境下本底材料放气率研究
Research on material's outgassing rate during internal gas content analysis
罗捷 1邱宝军 1张烨 1蔡宇宏 2夏江 1周帅 1陈海鑫1
作者信息
- 1. 工业和信息化部电子第五研究所,广东广州 510610
- 2. 兰州空间技术物理研究所,甘肃兰州 730000
- 折叠
摘要
Abstract
For internal gas content analysis of airtight packaging devices,the outgassing rate of the materials of a equipment is a crucial parameter that determine the accuracy of the analysis.Here the outgassing rate of five main materials of a vacuum equipment was studied by using static pressure rise method under three typical conditions of temperature and extraction time.The research shows that the outgassing rate of the 304 stainless steel,430 stainless steel and titanium materials is lower than that of carbon steel and high-purity aluminum under the same condition.And the outgassing rate of the same material increases with test time at high temperature.Finally,by considering material forming and other influential factors,it is suggested to choose the 304 and 430 stainless steel as the materials used in the cavity environment for the internal gas content analysis,and effective measures are given to reduce the background outgassing rate.关键词
内部气氛含量/放气率/气密封装器件/静态升压法Key words
internal atmosphere content/outgassing rate/hermetically sealed devices/static boosting method分类
信息技术与安全科学引用本文复制引用
罗捷,邱宝军,张烨,蔡宇宏,夏江,周帅,陈海鑫..内部气氛含量分析环境下本底材料放气率研究[J].电子元件与材料,2024,43(5):625-630,6.
