内部气氛含量分析环境下本底材料放气率研究OA北大核心CSTPCD

For internal gas content analysis of airtight packaging devices,the outgassing rate of the materials of a equipment is a crucial parameter that determine the accuracy of the analysis.Here the outgassing rate of five main materials of a vacuum equipment was studied by using static pressure rise method under three typical conditions of temperature and extraction time.The research shows that the outgassing rate of the 304 stainless steel,430 stainless steel and titanium materials is lower than that of carbon steel and high-purity aluminum under the same condition.And the outgassing rate of the same material increases with test time at high temperature.Finally,by considering material forming and other influential factors,it is suggested to choose the 304 and 430 stainless steel as the materials used in the cavity environment for the internal gas content analysis,and effective measures are given to reduce the background outgassing rate.