人工晶体学报2024，Vol.53Issue(6)：973-981,9.
尺寸效应对坩埚下降法生长氟化钙晶体影响机制的数值模拟分析
Numerical Simulation Investigation of Size Effect on Calcium Fluoride Crystals Grown by Vertical Bridgman Method
摘要
Abstract
High-quality,large-size CaF2 crystals are urgently needed for advanced applications such as deep ultraviolet lithography and aerospace cameras.However,growing such crystals is a challenging task in the field of crystal growth.Heat transfer,flow,and phase change processes of 3,7,and 20 inch(1 inch=2.54 cm)CaF2 crystals at different growth stages on the vertical Bridgman growth were conducted by numerical simulation.The results show that as the crystal size increases,the melt flow strength and the area of heat dissipation on the crucible wall increase,resulting in problems such as local depression of the melt-crystal interface,increase in the radial temperature difference,reversal of the temperature difference between the crystal edge and center,and decrease in the axial temperature gradient near the melt-crystal interface.Furthermore,this article discusses optimization strategies for growth rate and power of heater in the growth of large-size CaF2 crystals.关键词
CaF2晶体/坩埚下降法/尺寸效应/数值模拟/固液界面/温度梯度Key words
CaF2 crystal/vertical Bridgman method/size effect/numerical simulation/melt-crystal interface/temperature gradient分类
数理科学引用本文复制引用
施宇峰,王鹏飞,穆宏赫,苏良碧..尺寸效应对坩埚下降法生长氟化钙晶体影响机制的数值模拟分析[J].人工晶体学报,2024,53(6):973-981,9.基金项目
国家重点研发计划(2021YFE0104800) （2021YFE0104800）
国家自然科学基金(61925508) （61925508）
上海市科委项目(23511102700,23YF1413400) （23511102700,23YF1413400）
中国科学院稳定支持基础研究领域青年团队计划(YSBR-024) （YSBR-024）
