光学精密工程2024，Vol.32Issue(11)：1653-1666,14.DOI:10.37188/OPE.20243211.1653
干涉仪仪器传递函数噪声容限分析与优化
Analysis and optimization of noise tolerance for interferometer instrument transfer function
摘要
Abstract
In the evaluation of high-precision flat interferometer systems,the Instrument Transfer Func-tion(ITF)has become an essential index for assessing interferometer performance.It accurately characteriz-es the resolution capability of optical systems in measuring profiles at different spatial frequencies.Howev-er,strict experimental environment requirements and interference system noise can significantly distort ITF test results.To accurately characterize interferometer performance,this paper combines simulation analysis with practical experiments,introducing simulated interferograms into varying levels of Gaussian random noise.We explore the impact of noise on ITF test results,propose the ITFRMS value as an evalua-tion index for measurement error,and analyze the noise tolerance of the interferometer system.Several ITF test optimization methods are presented based on this evaluation index.An experimental system is built for analysis and validation.The final results indicate that in the unoptimized ITF testing process,the ITFRMS value of the interferometer system is 0.111 2.After optimization,with the same noise level,ITFRMS values reduce to 0.069 3,0.036 7,and 0.057 9,respectively.These results demonstrate the feasi-bility of the proposed optimization scheme,effectively suppressing noise interference during ITF testing of the interferometer system.关键词
干涉测量/斐索干涉仪/仪器传递函数/噪声容限Key words
interferometry technology/Fizeau interferometer/instrument transfer function/noise toler-ance分类
天文学引用本文复制引用
樊耀轩,张文喜,伍洲,杨帅,覃日康..干涉仪仪器传递函数噪声容限分析与优化[J].光学精密工程,2024,32(11):1653-1666,14.基金项目
中国科学院青年创新促进会基金资助项目(No.2020131) （No.2020131）
