光学精密工程2024，Vol.32Issue(11)：1667-1675,9.DOI:10.37188/OPE.20243211.1667
用于InGaAs单光子探测器的微透镜阵列及表征
Design and characterization of microlens arrays for InGaAs single photon detectors
摘要
Abstract
The integrated application of microlens and detector chip can improve the efficiency of light en-ergy utilization of the detector and thus increase the sensitivity of the detector.For two kinds of InP-based InGaAs single-photon infrared detectors,two kinds of square aperture microlens arrays with materials of GaP and Si are designed respectively.The design process of the structural parameters of the microlens ar-rays is introduced and the design points of each step are analyzed.The structural parameters of the de-signed microlens arrays are simulated and calibrated by ray tracing software,which determines that the two microlens arrays meet the design requirements.The morphology of the two fabricated microlens ar-rays was examined using a step meter and a confocal microscope.The curvature deviations of the two mi-crolens arrays were calculated to be 1.38%and 3.44%,respectively.The focal lengths of two microlens arrays in air at 1.064 μm wavelength were tested experimentally,and the focal deviations of 5.69%and 2.76%were obtained in comparison with the simulated results.By analyzing the manufacturing process of microlenses,the two deviations meet the application requirements.关键词
微透镜阵列/光探测器/光能利用率/矩形孔径Key words
microlens array/photodetector/light energy utilization/rectangular aperture分类
电子信息工程引用本文复制引用
张晨阳,莫德锋,徐红艳,马英杰,顾溢,李雪,苏文献..用于InGaAs单光子探测器的微透镜阵列及表征[J].光学精密工程,2024,32(11):1667-1675,9.基金项目
国家重点研发计划资助项目(No.2023YFB3209604) （No.2023YFB3209604）
国家自然科学基金资助项目(No.62075229,No.62175250) （No.62075229,No.62175250）
上海市科技重大项目(No.2019SZZX01) （No.2019SZZX01）
