用于InGaAs单光子探测器的微透镜阵列及表征OA北大核心CSTPCD

The integrated application of microlens and detector chip can improve the efficiency of light en-ergy utilization of the detector and thus increase the sensitivity of the detector.For two kinds of InP-based InGaAs single-photon infrared detectors,two kinds of square aperture microlens arrays with materials of GaP and Si are designed respectively.The design process of the structural parameters of the microlens ar-rays is introduced and the design points of each step are analyzed.The structural parameters of the de-signed microlens arrays are simulated and calibrated by ray tracing software,which determines that the two microlens arrays meet the design requirements.The morphology of the two fabricated microlens ar-rays was examined using a step meter and a confocal microscope.The curvature deviations of the two mi-crolens arrays were calculated to be 1.38%and 3.44%,respectively.The focal lengths of two microlens arrays in air at 1.064 μm wavelength were tested experimentally,and the focal deviations of 5.69%and 2.76%were obtained in comparison with the simulated results.By analyzing the manufacturing process of microlenses,the two deviations meet the application requirements.