电子与封装2024，Vol.24Issue(7)：90-97,8.DOI:10.16257/j.cnki.1681-1070.2024.0071
基于SECS/GEM协议的芯片烘箱设备智能故障诊断算法设计
Design of Intelligent Fault Diagnosis Algorithm for Chip Oven Equipment Based on SECS/GEM Protocol
摘要
Abstract
In view of the difficulty of fault troubleshooting of the chip oven equipment,an improved Bayesian network fault diagnosis algorithm is proposed.The SECS/GEM communication protocol is used to obtain fault alarm data from the equipment side,and the fault tree of the chip oven equipment is established.The fault tree is transformed into a Bayesian network,and the diagnostic decision tree that can be used to guide the maintenance work is obtained by reverse reasoning calculation of the Bayesian network.The historical fault sample data is substituted into the algorithm model for verification and analysis.The verification results show that the fault diagnosis according to the diagnostic decision tree can control the diagnosis error rate at about 5％,which meets the requirements of enterprise users and has high application value.关键词
故障树/贝叶斯网络/机器学习/芯片烘箱/SECS/GEMKey words
fault tree/Bayesian network/machine learning/chip oven/SECS/GEM分类
计算机与自动化引用本文复制引用
梁达平,赵玉祥,张进兵..基于SECS/GEM协议的芯片烘箱设备智能故障诊断算法设计[J].电子与封装,2024,24(7):90-97,8.基金项目
甘肃省科技重大专项(22ZD6GE016) （22ZD6GE016）
甘肃省高等学校创新基金(2022A-105) （2022A-105）
甘肃省2023年度重点人才项目"集成电路封装测试创新团队建设"(GZTZ202320) （GZTZ202320）
