人工晶体学报2024，Vol.53Issue(7)：1150-1159,10.
ITO/AgNWs/ITO薄膜的制备及其性能研究
Preparation and Properties of ITO/AgNWs/ITO Films
摘要
Abstract
With the advancement of display panel technology towards ultra-large size,ultra-high-definition and touch control capability,the traditional single indium tin oxide(ITO)film alone struggles to meet the increasingly demanding photoelectric performance requirements of display devices.Consequently,composite conductive films have been developed.This study fabricated an ITO(222)/AgNWs/ITO(400)composite film structure by embedding a two-dimensional silver nanowires(AgNWs)conductive networks into ITO films.The influences of the AgNWs addition and the sputtering temperature of the upper ITO film on the structural and optoelectronic properties of the composite film were systematically investigated.The AgNWs metal conductive networks not only enhance the electrical properties of the composite films but also maintain excellent optical characteristics.The results demonstrate that with a spin-coating of 600 μL AgNWs dispersion and a sputtering temperature of 175 ℃ for the upper ITO film,the fabricated composite ITO film has a sheet resistance of 7.13 Ω/□,an impressive transmittance of 91.52％at 550 nm,and a figure of merit of 57.82 x 10-3 Ω-1,achieving the preparation of a composite ITO film with ultra-low resistivity and high visible light transmittance.关键词
ITO薄膜/磁控溅射/AgNWs/导电网络/复合薄膜/光电性能/溅射温度Key words
ITO film/magnetron sputtering/AgNWs/conductive network/composite film/photoelectric property/sputtering temperature分类
数理科学引用本文复制引用
杨涛,陈彩明,黄瑜佳,吴少平,徐华蕊,汪坤喆,朱归胜..ITO/AgNWs/ITO薄膜的制备及其性能研究[J].人工晶体学报,2024,53(7):1150-1159,10.基金项目
国家自然科学基金(62364007,U21A2065) （62364007,U21A2065）
广西科技计划(桂科AA21077018,桂科AD23023013,桂科AB23075218) （桂科AA21077018,桂科AD23023013,桂科AB23075218）
桂林市科学研究与技术开发计划(20220120-1) （20220120-1）
电子信息材料与器件教育部工程研究中心重点基金(EIMD-AA202001) （EIMD-AA202001）
