计量学报2024，Vol.45Issue(7)：929-934,6.DOI:10.3969/j.issn.1000-1158.2024.07.01
柔性超导电路制备工艺技术研究
Research on Fabrication of Flexible Superconducting Circuits
摘要
Abstract
The superconducting transition edge sensor(TES)is the key device for the quantum reproduction of the Candela(Cd)unit and single energy X-ray quantum metrology.Transferring the signal from the large-scale TES array to the readout superconducting quantum interference device(SQUID)electronics on the side of the sensor unit relies on the flexible superconducting circuits.Superconducting transmission lines are fabricated on a flexible polyimide substrate for the low thermal conductivity and resistance-free signal transmission.A silicon(Si)wafer is used as a temporary supporting substrate,and a 100 nm Cr film as the sacrificial layer to release the polyimide(PI)film is e-beam evaporated on the Si.Polyimide acid is spin-coated on the Cr film and cured to form the PI film.The Nb/Al thin film transmission lines are fabricated onto the PI film by UV exposure,sputtering and lift-off processes.Then the PI film is released from the silicon substrate due to the high tensile stress of the Cr film,and then the Cr film is wet etched to complete the preparation of flexible superconducting circuits.The superconducting transition temperature Tc of the measured 40 Nb/Al transmission lines are 8.9.～9.02 K,and the residual resistance ratio(rRR,r300 K/r10 K)are 5.83～6.96.At 8 K,the critical current Ic of 38 samples is greater than 1 mA.At 4.2 K,the Ic of all the samples is greater than 1 mA,of which 25 samples are larger than 10 mA.The Tc and Ic satisfy the requirement of the signal transmission of the TES arrays.关键词
电学计量/超导转变边沿探测器/聚酰亚胺/柔性超导电路/超导转变温度/临界电流Key words
electrical metrology/transition edge sensor/polyimide/flexible superconducting circuit/superconducting transition temperature/critical current分类
通用工业技术引用本文复制引用
朱承峰,李万,陈建,孙潇莹,曾九孙,蔡晋辉,王振宇,李劲劲,王雪深..柔性超导电路制备工艺技术研究[J].计量学报,2024,45(7):929-934,6.基金项目
国家重点研发计划(2022YFF0608303) （2022YFF0608303）
