电子元件与材料2024，Vol.43Issue(7)：830-834,844,6.DOI:10.14106/j.cnki.1001-2028.2024.1643
柔性云母基底上的Ba0.77Sr0.23TiO3铁电薄膜的制备与研究
Preparation and property of Ba0.77Sr0.23TiO3 ferroelectric thin films on flexible mica substrate
摘要
Abstract
A method of preparing Ba0.77Sr0.23TiO3(BST)ferroelectric thin film on the flexible mica substrate by pulsed laser deposition(PLD)was introduced,and the microstructure and electrical properties of thin film were investigated.It was found that the prepared flexible BST films exhibited a single-crystal structure with(111)orientation and average roughness of only 1.96 nm.The residual polarization(2Pr)and maximum polarization(2Pmax)were tested as 6.46 μC/cm2 and 17.8 μC/cm2,respectively,demonstrating excellent ferroelectric property.After 1011 bipolar switching cycles,the BST film still exhibited good ferroelectric properties.Subsequently,the linear fitting analysis of the I-V curves were carried out and the conduction mechanism of BST film was revealed.As the electric field strength increased,the conduction mechanism changed from the ohmic contact mechanism to the space charge limited current(SCLC)effect mechanism.This study can provide a new way to prepare flexible nonvolatile storage devices.关键词
脉冲激光沉积法/柔性云母/Ba0.77Sr0.23TiO3/铁电薄膜Key words
pulsed laser deposition/flexible mica/Ba0.77Sr0.23TiO3/ferroelectric thin film分类
信息技术与安全科学引用本文复制引用
韦春树,杨俊锋,刘兴鹏,丁明建,彭一鸣..柔性云母基底上的Ba0.77Sr0.23TiO3铁电薄膜的制备与研究[J].电子元件与材料,2024,43(7):830-834,844,6.基金项目
国家自然科学基金(62361022) （62361022）
广西自然科学基金项目(2023GXNSFBA026216) （2023GXNSFBA026216）
广西电子信息材料构效关系重点实验室自主研究基金(231015-Z) （231015-Z）
