基于AlAsSb/InAsSb超晶格势垒的InAs/InAsSb Ⅱ类超晶格nBn中波红外探测器OA北大核心CSTPCD
Mid-wavelength infrared nBn photodetectors based on InAs/InAsSb type-Ⅱ superlattice with an AlAsSb/InAsSb superlattice barrier
InAs/InAsSb Ⅱ类超晶格避免了InAs/GaSb Ⅱ类超晶格中与Ga原子相关的缺陷复合中心,具有更高的少数载流子寿命,在高工作温度中波红外探测器制备方面有着良好的应用前景.少数载流子单极势垒结构通常被用来抑制探测器暗电流,如nBn结构探测器.在InAs/InAsSb Ⅱ类超晶格nBn中波红外光电探测器中,势垒层常采用AlAsSb等多元合金材料,阻挡多数载流子的输运.然而,势垒层与吸收层存在的价带偏移(VBO)使得光电流往往需要在大偏压下饱和,从而增大了探测器暗电流.本文设计了一种AlAsSb/InAsSb超晶格势垒,旨在消除VBO并降低量子效率对偏压的依赖性.研究结果显示,150 K下,设计制备的nBn光电探测器的50%截止波长为4.5 μm,探测器光响应在-50 mV的小反向偏压下达到了饱和,3.82 μm处的峰值响应度为1.82 A/W,对应量子效率为58.8%.在150 K和-50 mV偏压下,探测器的暗电流密度为2.01×10-5 A/cm2,计算得到在3.82 μm的峰值探测率为6.47×1011 cm·Hz1/2/W.
InAs/InAsSb type-Ⅱ superlattice(T2SL)materials hold great promise for the development of mid-wave-length infrared photodetectors operating at high temperatures,as they avoid the defects caused by Ga atoms in InAs/GaSb T2SL and exhibit long minority carrier lifetime.To reduce the dark current,minority carrier unipolar barrier struc-tures,such as nBn detectors,are commonly employed.In mid-wavelength infrared InAs/InAsSb T2SL nBn photodetec-tors,the multielement alloy such as AlAsSb is typically utilized as the barrier layer to block the transport of majority car-riers.However,the small valence band offset(VBO)between the barrier and absorption layers leads to the saturation of photocurrent at high bias voltage,resulting in increased dark current.In this work,an AlAsSb/InAsSb T2SL barrier was designed to eliminate the VBO and reduce the bias dependency of quantum efficiency.The results show that the fab-ricated nBn photodetector exhibits a 50%cutoff wavelength of 4.5 μm at 150 K.The optical response of the photodetec-tor saturates under a small bias of-50 mV,achieving a peak responsivity of 1.82 A/W at 3.82 μm and a quantum effi-ciency of 58.8%.At 150 K and-50 mV applied bias,the photodetector exhibits a dark current density of 2.01×10-5 A/cm2 and a specific detectivity of 6.47×1011 cm·Hz1/2/W.
单一凡;徐应强;牛智川;吴东海;谢若愚;周文广;常发冉;李农;王国伟;蒋洞微;郝宏玥
中国科学院半导体研究所 光电子材料与器件重点实验室,北京 100083||中国科学院大学 材料科学与光电技术学院,北京 100049中国科学院半导体研究所 光电子材料与器件重点实验室,北京 100083
电子信息工程
InAs/InAsSbⅡ类超晶格AlAsSb/InAsSb势垒中波红外势垒探测器
InAs/InAsSbtype-Ⅱ superlatticeAlAsSb/InAsSb barriermid-wavelength infraredbarrier detector
《红外与毫米波学报》 2024 (004)
450-456 / 7
Supported by the Research Foundation for Advanced Talents of the Chinese Academy of Sciences(E27RBB03)
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