光学精密工程2024，Vol.32Issue(17)：2698-2707,10.DOI:10.37188/OPE.20243217.2698
接触式与白光干涉测头复合测量坐标统一与数据融合
Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes
摘要
Abstract
To achieve high-precision measurements of these components,micro/nano contact probes and white light interferometric probes must be combined for composite measurement.This paper presents a method to unify the spatial coordinate systems of the two probes using calibration points from a custom cali-brator and the unit quaternion method to derive the spatial transformation matrix,evaluated by root mean square error(RMSE).A novel calibrator was designed to offer stable reference points,with a model link-ing their accuracy to coordinate unification precision.Additionally,a data fusion method blending spatial er-ror ellipsoid search with weighted least squares was proposed,demonstrating a registration accuracy of 1.889 μm.This method decreased the relative error by 16%and improved repeatability precision by 38%compared to traditional least squares.The research enhanced the measurement precision and data fusion stability of composite measurement systems.关键词
接触式测头/白光干涉测头/复合测量/坐标统一/数据融合Key words
contact probe/white-light interference probe/composite measurement/coordinate unifica-tion/data fusion分类
机械工程引用本文复制引用
程真英,徐东见,张成瑶,刘云龙,李瑞君..接触式与白光干涉测头复合测量坐标统一与数据融合[J].光学精密工程,2024,32(17):2698-2707,10.基金项目
国家重点研发计划资助项目(No.2019YFB2004902) （No.2019YFB2004902）
国家自然科学基金资助项目(No.52175506) （No.52175506）
