电子与封装2024，Vol.24Issue(11)：55-58,4.DOI:10.16257/j.cnki.1681-1070.2024.0160
带玻璃绝缘子结构器件气密性与内部水汽含量超标分析
Analysis of Air Tightness and Excessive Internal Water Vapor Content of Structural Devices with Glass Insulators
高立 1杨迪 1李旭1
作者信息
- 1. 中国电子技术标准化研究院,北京 100176
- 折叠
摘要
Abstract
Devices with cavity structures are subjected to sealing tests(commonly known as leak detection)to determine the airtightness of the device package.However,in actual production,even if the devices that have passed the sealing test are tested for internal water vapor content,a certain proportion of the devices are still detected to have tracer substances inside for the sealing tests.The test results show that the high temperature baking can improve the detection rate of leak detection,verifying that the phenomenon of qualified seal detection and unqualified water vapor content of the device is caused by temporary blockage of the leakage holes.Dye penetration and profile preparation of the sample with unqualified water vapor content are carried out,and the channel of external water vapor intrusion into the interior of the device is found.It is pointed out that the main reason of air leakage of device is that there is no airtight transition layer between the glass insulator and the lead wire,which provides the direction for the process improvement of the device.关键词
金属-玻璃/封装气密性/内部水汽含量Key words
metal-glass/air tightness of package/internal water vapor content分类
信息技术与安全科学引用本文复制引用
高立,杨迪,李旭..带玻璃绝缘子结构器件气密性与内部水汽含量超标分析[J].电子与封装,2024,24(11):55-58,4.
