电子元件与材料2025，Vol.44Issue(1)：41-48,8.DOI:10.14106/j.cnki.1001-2028.2025.1544
无线无源声表面波传感器温度补偿方法
Temperature compensation method for wireless passive surface acoustic wave sensor
摘要
Abstract
This study presented the design of a passive wireless strain sensor based on the principle of Surface Acoustic Waves(SAW)for long-term monitoring of state parameters in closed environments.To address the problems arising from temperature interference in strain measurements,a temperature compensation method using the least squares approach was proposed.By applying perturbation theory and finite element analysis,simulations and calculations were conducted to determine the strain coefficient and temperature-frequency coefficient of the sensor.Farthermore,polynomial fitting was applied to establish a compensation formula that relates the strain coefficient to temperature.A SAW strain sensor testing system was constructed,which can measure the frequency response in the 0-1000 με range across various temperature conditions of 30,36,50,and 60℃.Utilizing the experimental data,the temperature·s influence coefficient on the strain coefficient was identified.By substituting the experimentally derived resonator frequencies into the compensation model,the strain measurement error was effectively reduced from 31.2%to 3.9%within the temperature range of 30-60℃.关键词
声表面波/应变传感器/应变灵敏度/温度补偿Key words
surface acoustic wave/strain sensor/strain sensitivity/temperature compensation分类
计算机与自动化引用本文复制引用
徐静宁,蔡飞达,张勇斌,卢铭瑞,王晗..无线无源声表面波传感器温度补偿方法[J].电子元件与材料,2025,44(1):41-48,8.基金项目
中物院发展项目专题资助(K1357) （K1357）
