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功率器件封装用纳米铜焊膏及其烧结技术研究进展

王秀琦 李一凡 罗子康 陆大世 计红军

电子与封装2025,Vol.25Issue(3):1-15,15.
电子与封装2025,Vol.25Issue(3):1-15,15.DOI:10.16257/j.cnki.1681-1070.2025.0046

功率器件封装用纳米铜焊膏及其烧结技术研究进展

Progress of Research on Nano Copper Solder Paste and Its Sintering Technology for Power Device Packaging

王秀琦 1李一凡 1罗子康 1陆大世 1计红军2

作者信息

  • 1. 哈尔滨工业大学(深圳)集成电路学院,广东 深圳 518055||哈尔滨工业大学(深圳)材料结构精密焊接与连接全国重点实验室深圳分室,广东 深圳 518055||哈尔滨工业大学(深圳)材料科学与工程学院,广东 深圳 518055
  • 2. 哈尔滨工业大学(深圳)集成电路学院,广东 深圳 518055||哈尔滨工业大学(深圳)材料结构精密焊接与连接全国重点实验室深圳分室,广东 深圳 518055
  • 折叠

摘要

Abstract

Third-generation semiconductor as the core of the power electronics devices towards high power density and high junction temperature direction presents strict challenges to the package interconnect materials,processes and reliability under service conditions.Nano copper(Cu)solder paste has emerged as a kind of industrialization potential power device packaging candidate material owing to its low cost,electromigration resistance,and excellent electrical and thermal conductivity,along with the characteristic of"low-temperature sintering and high-temperature service",which has been closely concerned by the researchers.However,there is still a large gap between the stability(easy oxidation)and low-temperature sintering performance of nano-copper solder pastes compared to nano-silver(Ag)solder pastes.Based on the experimental results,the latest progress of nano-copper solder paste sintering technology is systematically described in terms of sintering mechanisms,sintering processes,performance behavior and service reliability of nano-copper sintered joints.Furthermore,in view of the shortcomings of the current nano-copper sintering technology,the subsequent development direction and research prospects are prospected.

关键词

电子封装/第三代半导体/烧结/纳米铜/纳米铜焊膏/抗剪强度/可靠性

Key words

electronic packaging/third-generation semiconductor/sintering/nano copper/nano copper solder paste/shear strength/reliability

分类

金属材料

引用本文复制引用

王秀琦,李一凡,罗子康,陆大世,计红军..功率器件封装用纳米铜焊膏及其烧结技术研究进展[J].电子与封装,2025,25(3):1-15,15.

基金项目

国家自然科学基金(NSFC 51775140、NSFC 52232004) (NSFC 51775140、NSFC 52232004)

广东省重点领域研发计划(2019B010935001) (2019B010935001)

中央高校基本科研业务费(HIT.DZJJ.2023112) (HIT.DZJJ.2023112)

电子与封装

1681-1070

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