电子元件与材料2025，Vol.44Issue(3)：251-258,8.DOI:10.14106/j.cnki.1001-2028.2025.1468
基于FDR的SiC-MOSFET栅极氧化层失效无损检测方法研究
Non-destructive detection method for gate oxide layer failure in SiC-MOSFET based on FDR
摘要
Abstract
It is critical to develop a non-destructive testing method for gate oxide layer failure for improving the reliability of SiC-MOSFETs.Here a small-signal equivalent circuit model was firstly constructed based on the actual physical structure of the SiC-MOSFET,which was then transformed into a frequency-domain impedance characterization model to suit the T-network analysis.After that,a frequency domain reflectometry(FDR)technique was employed to achieve precise determination of the parasitic parameters.Finally,a test platform was established for static high-temperature gate bias aging.The threshold voltage(VGS(th))aging tests were sequentially conducted for durations from 200 to 1000 hours.The results show that after the aging the VGS(th)of all SiC-MOSFETs(sample 1-5)exhibit positive drift.The corresponding parasitic capacitance CGS and CGD continuously increases and decreases respectively,and small impact is observed for CDS·Specifically,for the severely degraded device of No.5,CDS only varies by-0.78％,while CGS increases by 6.65％,and CGD significantly decreases by 23.75％.Furthermore,the resonant frequencies of its frequency-domain impedance curves(Z11,Z12,Z21and Z22)have all increased,and the Z22 impedance at 100 kHz significantly decreases,which indicates that a mapping characteristic is highly correlated with the gate oxide layer failure.Based on the FDR technique,it is possible to achieve rapid and non-destructive detection of gate oxide failure without relying on the conduction state of the power device and additional test circuits,which has broad application.关键词
SiC-MOSFET/栅极氧化层失效/无损检测/FDR技术/寄生电容Key words
SiC-MOSFET/gate oxide layer failure/non-destructive detection/FDR technique/parasitic capacitance分类
电子信息工程引用本文复制引用
张俊杰,贠明辉,谭亮,韩兴国,蔡苗..基于FDR的SiC-MOSFET栅极氧化层失效无损检测方法研究[J].电子元件与材料,2025,44(3):251-258,8.基金项目
国家自然科学基金(62264003) （62264003）
广西自然科学基金面上项目(2023GXNSFAA026188) （2023GXNSFAA026188）
自治区级大学生创新创业训练计划项目(S202410595311) （S202410595311）
