电子与封装2025，Vol.25Issue(6)：17-23,7.DOI:10.16257/j.cnki.1681-1070.2025.0052
某MEMS垂直探针在针测行程作用下的屈曲力学行为研究
Study on the Buckling Mechanical Behavior of a MEMS Vertical Probe Under the Action of Needle Measurement Stroke
秦林肖1
作者信息
- 1. 强一半导体(苏州)股份有限公司,江苏苏州 215000
- 折叠
摘要
Abstract
As a testing interface,the probe card serves as an intermediary between the chip and the testing machine,and the probes used in wafer testing are important functional components for communication between the testing machine and the tested chip on the wafer.Based on a certain specification of MEMS vertical probe,finite element analysis software was used to compare and analyze the key mechanical properties of five probes with different initial contact states with the upper and lower cover plates of the probe card assembled together under the same needle measurement stroke.Based on the buckling theory,a fitting method was used to derive the functional relationship between the balanced contact force of the probe and the loaded needle measurement stroke.关键词
探针卡/MEMS垂直探针/有限元分析/针测行程/平衡接触力Key words
probe card/MEMS vertical probe/finite element analysis/needle measurement stroke/balanced contact force分类
电子信息工程引用本文复制引用
秦林肖..某MEMS垂直探针在针测行程作用下的屈曲力学行为研究[J].电子与封装,2025,25(6):17-23,7.
