电子元件与材料2025，Vol.44Issue(4)：394-401,8.DOI:10.14106/j.cnki.1001-2028.2025.0094
基于信号调制的微型声表面波雾化器设计与性能研究
Design and performance of miniature surface acoustic wave nebulizer based on signal modulation
摘要
Abstract
Aiming at the thermal effect of the current nebulizer,a miniature surface acoustic wave nebulizer was designed and fabricated.The thermal failure mechanism was tested and analyzed,and the signal modulation was applied to achieve faster nebulization under lower power.The results demonstrate that for three typical fluids(propylene glycol,anhydrous ethanol and deionized water)with different physicochemical properties,the utilization of the signal modulation method could improve the nebulization rate by 97％,145％,187％,respectively with reduced driving power,so the reliability of nebulizer is enhanced.The surface heat distribution of the nebulizer,the maximum thermal stress level and thermal failure mechanism were systematically analyzed.The modulation signal with a modulation depth of 100％and modulation frequency of 1 kHz exhibits the optimal performance.关键词
声表面波/雾化/微流体/信号调制/热失效Key words
surface acoustic wave/nebulization/microfluidics/signal modulation/thermal failure分类
信息技术与安全科学引用本文复制引用
尹盛华,许高斌,王峰,马渊明,冯建国..基于信号调制的微型声表面波雾化器设计与性能研究[J].电子元件与材料,2025,44(4):394-401,8.基金项目
安徽省科技创新攻坚计划项目(202423k09020047) （202423k09020047）
国家重点研发项目(2022YFB3205903) （2022YFB3205903）
中央高校基本科研业务费(JZ2023HGTB0271) （JZ2023HGTB0271）
